Æ©ºêÀü±â·Î ÆÐÅ°Áö, 1800¡É, Æ©ºêÀü±â·Î ÆÐÅ°Áö(CVD,annealing), FU-PK-S3, (300mm ¨ª100)
¹«·á¹è¼Û¼³Ä¡
Á¦Ç°ÄÚµå : FU-PK-S3
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Æ©ºêÀü±â·Î ÆÐÅ°Áö, 1800¡É, Æ©ºêÀü±â·Î ÆÐÅ°Áö(CVD,annealing), FU-PK-S2, (300mm ¨ª80)
¹«·á¹è¼Û¼³Ä¡
Á¦Ç°ÄÚµå : FU-PK-S2
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Æ©ºêÀü±â·Î ÆÐÅ°Áö, 1800¡É, Æ©ºêÀü±â·Î ÆÐÅ°Áö(CVD,annealing), FU-PK-S1, (300mm ¨ª50)
¹«·á¹è¼Û¼³Ä¡
Á¦Ç°ÄÚµå : FU-PK-S1
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Æ©ºêÀü±â·Î ÆÐÅ°Áö, 1700¡É, Æ©ºêÀü±â·Î ÆÐÅ°Áö(CVD,annealing), FU-PK-S4, (300mm ¨ª120)
¹«·á¹è¼Û¼³Ä¡
Á¦Ç°ÄÚµå : FU-PK-S4
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Æ©ºêÀü±â·Î ÆÐÅ°Áö, 1700¡É, Æ©ºêÀü±â·Î ÆÐÅ°Áö(CVD,annealing), FU-PK-S3, (300mm ¨ª100)
¹«·á¹è¼Û¼³Ä¡
Á¦Ç°ÄÚµå : FU-PK-S3
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Æ©ºêÀü±â·Î ÆÐÅ°Áö, 1700¡É, Æ©ºêÀü±â·Î ÆÐÅ°Áö(CVD,annealing), FU-PK-S2, (300mm ¨ª80)
¹«·á¹è¼Û¼³Ä¡
Á¦Ç°ÄÚµå : FU-PK-S2
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Æ©ºêÀü±â·Î ÆÐÅ°Áö, 1700¡É, Æ©ºêÀü±â·Î ÆÐÅ°Áö(CVD,annealing), FU-PK-S1, (300mm ¨ª50)
¹«·á¹è¼Û¼³Ä¡
Á¦Ç°ÄÚµå : FU-PK-S1
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Æ©ºêÀü±â·Î ÆÐÅ°Áö, 1500¡É, Æ©ºêÀü±â·Î ÆÐÅ°Áö(CVD,annealing), FU-PK-H4, (300mm ¨ª120)
¹«·á¹è¼Û¼³Ä¡
Á¦Ç°ÄÚµå : FU-PK-H4
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Æ©ºêÀü±â·Î ÆÐÅ°Áö, 1500¡É, Æ©ºêÀü±â·Î ÆÐÅ°Áö(CVD,annealing), FU-PK-H3, (300mm ¨ª100)
¹«·á¹è¼Û¼³Ä¡
Á¦Ç°ÄÚµå : FU-PK-H3
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Æ©ºêÀü±â·Î ÆÐÅ°Áö, 1500¡É, Æ©ºêÀü±â·Î ÆÐÅ°Áö(CVD,annealing), FU-PK-H2, (300mm ¨ª80)
¹«·á¹è¼Û¼³Ä¡
Á¦Ç°ÄÚµå : FU-PK-H2
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Æ©ºêÀü±â·Î ÆÐÅ°Áö, 1500¡É, Æ©ºêÀü±â·Î ÆÐÅ°Áö(CVD,annealing), FU-PK-H1, (300mm ¨ª50)
¹«·á¹è¼Û¼³Ä¡
Á¦Ç°ÄÚµå : FU-PK-H1
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Æ©ºêÀü±â·Î ÆÐÅ°Áö, 1200¡É, Æ©ºêÀü±â·Î ÆÐÅ°Áö(CVD,annealing), FU-PK-G4-S, (300mm ¨ª120)
Á¦Ç°ÄÚµå : SH-FU-PK-G4-S
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Æ©ºêÀü±â·Î ÆÐÅ°Áö, 1200¡É, Æ©ºêÀü±â·Î ÆÐÅ°Áö(CVD,annealing), FU-PK-G3-S, (300mm ¨ª100)
Á¦Ç°ÄÚµå : SH-FU-PK-G3-S
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Æ©ºêÀü±â·Î ÆÐÅ°Áö, 1200¡É, Æ©ºêÀü±â·Î ÆÐÅ°Áö(CVD,annealing), FU-PK-G2-S, (300mm ¨ª80)
Á¦Ç°ÄÚµå : SH-FU-PK-G2-S
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Æ©ºêÀü±â·Î ÆÐÅ°Áö, 1200¡É, Æ©ºêÀü±â·Î ÆÐÅ°Áö(CVD,annealing), FU-PK-G1-S, (300mm ¨ª50)
Á¦Ç°ÄÚµå : SH-FU-PK-G1-S
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°¡½ºÇ÷ÎÆÐÅ°Áö, 1200¡É, 3Á¸ °¡½ºÇ÷ÎÆÐÅ°Áö, Gas Flow Package, SH-FU-120LTG-3-WG, (200mm x 3 Hot Zone..
Á¦Ç°ÄÚµå : SH-FU-120LTG-3-WG
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°¡½ºÇ÷ÎÆÐÅ°Áö, 1200¡É, 3Á¸ °¡½ºÇ÷ÎÆÐÅ°Áö, Gas Flow Package, SH-FU-100LTG-3-WG, (200mm x 3 Hot Zone..
Á¦Ç°ÄÚµå : SH-FU-100LTG-3-WG
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°¡½ºÇ÷ÎÆÐÅ°Áö, 1200¡É, 3Á¸ °¡½ºÇ÷ÎÆÐÅ°Áö, Gas Flow Package, SH-FU-80LTG-3-WG, (200mm x 3 Hot Zone ..
Á¦Ç°ÄÚµå : SH-FU-80LTG-3-WG
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¿Ç³°ÇÁ¶±â, »ê¾÷¿ë ¿Ç³°ÇÁ¶±â, 300¡É , 2232L, SH-IDO-2250FH
Á¦Ç°ÄÚµå : SH-IDO-2250FH
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¿Ç³°ÇÁ¶±â, »ê¾÷¿ë ¿Ç³°ÇÁ¶±â, 300¡É , 1152L, SH-IDO-1152FH
Á¦Ç°ÄÚµå : SH-IDO-1152FH
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